Direct observation of the leakage current in epitaxial diamond Schottky barrier devices by conductive-probe atomic force microscopy and Raman imaging

被引:12
作者
Alvarez, J. [1 ]
Boutchich, M. [1 ]
Kleider, J. P. [1 ]
Teraji, T. [2 ]
Koide, Y. [2 ]
机构
[1] Univ Paris 11, Univ Paris 06, Sorbonne Univ, CNRS UMR 8507,Lab Geenie Elcet Paris, F-91192 Gif Sur Yvette, France
[2] Natl Inst Mat Sci, Wide Bandgap Mat Grp, Optic & Elect Mat Unit, Tsukuba, Ibaraki 3050044, Japan
关键词
diamond; Schottky devices; leakage current; characterization; Raman; conducting probe AFM; CHARGE-LIMITED CURRENT; CVD DIAMOND; CATHODOLUMINESCENCE; BREAKDOWN; DEFECTS; DENSITY; DIODES; STATES; SI;
D O I
10.1088/0022-3727/47/35/355102
中图分类号
O59 [应用物理学];
学科分类号
摘要
The origin of the high leakage current measured in several vertical-type diamond Schottky devices is conjointly investigated by conducting probe atomic force microscopy and confocal micro-Raman/photoluminescence imaging analysis. Local areas characterized by a strong decrease of the local resistance (5-6 orders of magnitude drop) with respect to their close surrounding have been identified in several different regions of the sample surface. The same local areas, also referenced as electrical hot-spots, reveal a slightly constrained diamond lattice and three dominant Raman bands in the low-wavenumber region (590, 914 and 1040 cm(-1)). These latter bands are usually assigned to the vibrational modes involving boron impurities and its possible complexes that can electrically act as traps for charge carriers. Local current-voltage measurements performed at the hot-spots point out a trap-filled-limited current as the main conduction mechanism favouring the leakage current in the Schottky devices.
引用
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页数:10
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