Tungsten added Sb80Te20 for phase-change RAM

被引:10
作者
Kao, Kin-Fu [1 ]
Cheng, Huai-Yu
Jong, Chao-An
Lan, Chi-Jui
Chin, Tsung-Shune
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan
[2] Ind Technol Res Inst, Chutung 31040, Taiwan
关键词
crystallization temperature; electrical resistivity; phase-change memory; reset current; tungsten doped Sb-Te;
D O I
10.1109/TMAG.2006.888517
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Sb-80 Te-20 has the merit of high crystallization speed yet with low crystallization temperature (T-infinity similar to 132 degrees C), and hence, not suitable for use as a medium of phase change random access memory (PCRAM). We proposed to add refractory metals to solve this problem. It was found that W-added Sb80Te20 show increased T-infinity up to 233 degrees C with increasing W. More important, the melting temperature of W-Sb-Te materials, 536-539 degrees C irrespective of W content, is more than 80 degrees C lower than that of Ge2Sb2Te5. They show a two to four orders of magnitude lowering in resistance during phase change from an amorphous to a crystalline state. With these promising properties, the composition Sb-80 Te-17 W-3 is recommended as a potential candidate for PCRAM.
引用
收藏
页码:930 / 932
页数:3
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