Characterization of laser-induced plasma plume:: Comparison between Al and Al2O3 targets

被引：11

作者：

Furusawa, H ^{[1
]}

Sakka, T ^{[1
]}

Ogata, YH ^{[1
]}

机构：

[1] Kyoto Univ, Inst Adv Energy, Kyoto 6110011, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2004年 / 79卷 / 4-6期

关键词：

D O I：

10.1007/s00339-004-2753-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Characterization of the plasma plume produced by laser ablation from Al and Al2O3 targets was carried out on the basis of the line profile analysis of Al(I) ((2)Pdegrees-S-2) emission. The spatial distribution and density parameters of electrons and Al atoms in the plume were obtained by comparing observed spectral line profiles with a theoretical calculation. The results showed different behavior for the Al and Al2O3 targets. The Al atoms from the Al2O3 target were populated in a smaller region than those from the Al target.

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页码：1291 / 1294

页数：4

相关论文

共 12 条

[1] Energy distribution of ions produced by excimer-laser ablation of solid and molten targets [J].

Franghiadakis, Y ;

Fotakis, C ;

Tzanetakis, P .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 68 (04) :391-397

[2] Gas-phase nanoparticle formation and transport during pulsed laser deposition of Y1Ba2Cu3O7-d [J].

Geohegan, DB ;

Puretzky, AA ;

Rader, DJ .

APPLIED PHYSICS LETTERS, 1999, 74 (25) :3788-3790

[3]

Haglund Jr. R.F., 1994, LASER ABLATION PRINC, P11, DOI DOI 10.1007/978-3-642-78720-1.CH2

[4] Diagnostics of the early phase of an ultraviolet laser induced plasma by spectral line analysis considering self-absorption [J].

Hermann, J ;

Boulmer-Leborgne, C ;

Hong, D .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (02) :691-696

[5] Dynamics of silicon plume generated by laser ablation and its chemical reaction [J].

Makimura, T ;

Murakami, K .

APPLIED SURFACE SCIENCE, 1996, 96-8 :242-250

[6]

Miller J. C., 1994, LASER ABLATION PRINC, P1

[7] Observation of the light emitting region produced by pulsed laser irradiation to a solid-liquid interface [J].

Saito, K ;

Takatani, K ;

Sakka, T ;

Ogata, YH .

APPLIED SURFACE SCIENCE, 2002, 197 :56-60

[8] Laser ablation at solid-liquid interfaces: An approach from optical emission spectra [J].

Sakka, T ;

Iwanaga, S ;

Ogata, YH ;

Matsunawa, A ;

Takemoto, T .

JOURNAL OF CHEMICAL PHYSICS, 2000, 112 (19) :8645-8653

[9] Spatial population distribution of laser ablation species determined by self-reversed emission line profile [J].

Sakka, T ;

Nakajima, T ;

Ogata, YH .

JOURNAL OF APPLIED PHYSICS, 2002, 92 (05) :2296-2303

[10] Distributions of C2 and C3 radical densities in laser-ablation carbon plumes measured by laser-induced fluorescence imaging spectroscopy [J].

Sasaki, K ;

Wakasaki, T ;

Matsui, S ;

Kadota, K .

JOURNAL OF APPLIED PHYSICS, 2002, 91 (07) :4033-4039