Si2+ ion implanted into stoichiometric lithium niobate crystals:: Waveguide characterization and lattice disorder analysis

被引：23

作者：

Wang, Lei ^{[1
]}

Chen, Feng

Wang, Xue-Lin

Wang, Liang-Ling

Wang, Ke-Ming

Gao, Lei

Ma, Hong-Ji

Nie, Rui

机构：

[1] Shandong Univ, Sch Phys & Microelect, Jinan 250100, Peoples R China

[2] Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Peoples R China

[3] Peking Univ, Minist Educ, Key Lab Heavy Ion Phys, Beijing 100871, Peoples R China

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2006年 / 251卷 / 01期

基金：

中国国家自然科学基金;

关键词：

ion implantation; stoichiometric LiNbO3; optical planar waveguide;

D O I：

10.1016/j.nimb.2006.06.012

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

z-Cut stoichiometric lithium niobate crystals are implanted by 3.6 MeV Si2+ ions at doses of 3-10 x 10(13) ions/cm(2) at room temperature. Planar waveguides are formed by the ion irradiation induced extraordinary refractive index enhancement in the near surface regions. The waveguide properties are characterized by prism coupling and finite difference method. The effective refractive indices of the TM modes increase when implantation of higher doses is performed. It is found that the lattice damage could be considerably reduced or even almost removed by suitable annealing treatment. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：104 / 108

页数：5

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