Properties of dust particles formed upon sputtering of a barium strontium titanate ceramic target in plasma of high-frequency discharge in oxygen

被引：1

作者：

Alikhadzhiev, S. Kh. ^{[1
]}

Lyanguzov, N. V. ^{[2
]}

Plyaka, P. S. ^{[3
]}

Tolmachev, G. N. ^{[3
]}

机构：

[1] Chechen State Univ, Grozny 364037, Chechen Republi, Russia

[2] Southern Fed Univ, Dept Phys, Rostov Na Donu 344006, Russia

[3] Russian Acad Sci, Southern Res Ctr, Rostov Na Donu 344006, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2014年 / 40卷 / 09期

关键词：

Dust Particle; Technical Physic Letter; Dust Cloud; Strontium Titanate; Barium Strontium Titanate;

D O I：

10.1134/S1063785014090168

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have studied the behavior and properties of dust particles formed upon sputtering of a barium strontium titanate Ba(0.8)Sr(0.2)TiO3 ceramic target in plasma of capacitive high-frequency discharge in oxygen. The particles were accumulated in potential traps situated near the target at a remote position of the substrate. Dependences of the density of accumulated dust on the pressure, discharge power, substrate position, and substrate voltage were determined using laser-radiation scattering. The dimensions and composition of collected dust particles were determined.

引用

页码：819 / 821

页数：3

共 7 条

[1]

Kazaryan M. A., 2012, IZV TOMSK POLITEKH U, V321, P58

[2] Decomposition of nitric oxide over barium oxide supported on magnesium oxide .2. In situ Raman characterization of phases present during the catalytic reaction [J].

Mestl, G ;

Rosynek, MP ;

Lunsford, JH .

JOURNAL OF PHYSICAL CHEMISTRY B, 1997, 101 (45) :9321-9328

[3]

Mukhortov V.M., 2008, HETEROSTRUCTURES BAS

[4] Features of the spectra of optical emission from high-frequency discharge plasma during bismuth ferrite sputtering [J].

Plyaka, P. S. ;

Tolmachev, G. N. .

TECHNICAL PHYSICS LETTERS, 2010, 36 (02) :192-194

[5] Destructive adsorption of carbon tetrachloride on alkaline earth metal oxides [J].

Weckhuysen, BM ;

Mestl, G ;

Rosynek, MP ;

Krawietz, TR ;

Haw, JF ;

Lunsford, JH .

JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (19) :3773-3778

[6] Influence of the growth mechanism and thermoelastic stresses on the lattice dynamics of heteroepitaxial films of barium strontium titanate [J].

Yuzyuk, Yu. I. ;

Zakharchenko, I. N. ;

Alyoshin, V. A. ;

Leont'ev, I. N. ;

Rabkin, L. M. ;

Mukhortov, V. M. ;

Simon, P. .

PHYSICS OF THE SOLID STATE, 2007, 49 (09) :1759-1765

[7]

Zinchenko S. P., 2012, Applied Physics, P53

← 1 →