Study of the fluence dependent interplay between laser induced material removal mechanisms in metals: Vaporization, melt displacement and melt ejection

被引:74
作者
Fishburn, J. M.
Withford, M. J. [1 ]
Coutts, D. W.
Piper, J. A.
机构
[1] Macquarie Univ, Dept Phys, Ctr Lasers & Applicat, Sydney, NSW 2109, Australia
[2] Univ Oxford, Dept Phys, Clarendon Lab, Oxford OX1 3PU, England
基金
澳大利亚研究理事会;
关键词
nanosecond laser; laser ablation; vaporization; melt displacements; melt ejection;
D O I
10.1016/j.apsusc.2005.07.053
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Three quantitative methods, namely profilometry, high speed imaging and recoil momentum measurements using a ballistic pendulum, are used to determine the interplay of vaporization, melt displacement and melt ejection on nanosecond laser induced material removal. At low to moderate fluences (< 7 J cm(-2)) material removal occurs via vaporization and melt displacement in aluminium. At high fluences (> 7 J cm(-2)), material removal occurs predominantly via the explosive ejection of liquid droplets from the melt pool. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:5182 / 5188
页数:7
相关论文
共 15 条
[1]   ONE-DIMENSIONAL STEADY-STATE MODEL FOR DAMAGE BY VAPORIZATION AND LIQUID EXPULSION DUE TO LASER-MATERIAL INTERACTION [J].
CHAN, CL ;
MAZUMDER, J .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) :4579-4586
[2]   Double-pass copper vapor laser master-oscillator power-amplifier systems: Generation of flat-top focused beams for fiber coupling and percussion drilling [J].
Coutts, DW .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 2002, 38 (09) :1217-1224
[3]   Method for determination of the volume of material ejected as molten droplets during visible nanosecond ablation [J].
Fishburn, JM ;
Withford, MJ ;
Coutts, DW ;
Piper, JA .
APPLIED OPTICS, 2004, 43 (35) :6473-6476
[4]   Mechanisms of ablation-rate decrease in multiple-pulse laser ablation [J].
Gamaly, EG ;
Rode, AV ;
Perrone, A ;
Zocco, A .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 73 (02) :143-149
[5]   COMPUTATIONAL STUDY OF HEAT-TRANSFER AND GAS-DYNAMICS IN THE PULSED-LASER EVAPORATION OF METALS [J].
HO, JR ;
GRIGOROPOULOS, CP ;
HUMPHREY, JAC .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (07) :4696-4709
[6]   The dynamic properties of shock-waves formed during laser ablation at sub-atmospheric pressures [J].
Kapitan, D ;
Coutts, DW .
EUROPHYSICS LETTERS, 2002, 57 (02) :205-211
[7]   Comments on explosive mechanisms of laser sputtering [J].
Kelly, R ;
Miotello, A .
APPLIED SURFACE SCIENCE, 1996, 96-8 :205-215
[8]   KRF-LASER ABLATION OF POLYURETHANE [J].
KUPER, S ;
BRANNON, J .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1993, 57 (03) :255-259
[9]   PULSED LASER-INDUCED DAMAGE THRESHOLD STUDIES OF THIN ALUMINUM FILMS ON QUARTZ - SIMULTANEOUS MONITORING OF OPTICAL AND ACOUSTIC-SIGNALS [J].
LAI, YM ;
CHEUNG, NH .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (06) :1606-1610
[10]  
Martynyuk M. M., 1983, Russ. J. Phys. Chem, V57, P494