Metal nanocrystal memories - Part II: Electrical characteristics

被引:140
作者
Liu, ZT [1 ]
Lee, C [1 ]
Narayanan, V [1 ]
Pei, G [1 ]
Kan, EC [1 ]
机构
[1] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA
关键词
memories; metals; MOSFETS; work function;
D O I
10.1109/TED.2002.802618
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes the electrical characteristics of the metal nanocrystal memory devices continued from the previous paper [1]. Devices with An, Ag, and Pt nanocrystals working in the F-N tunneling regime have been investigated and compared with Si nanocrystal memory devices. With hot-carrier injection such as the programming mechanism, retention time up to 10(6) s has been observed and 2-bit-per-cell storage capability has been demonstrated and analyzed. The concern of the possible metal contamination is also addressed by current-voltage (I-V) and capacitance-voltage (C-V) characterizations. The extracted inversion layer mobility and minority carrier lifetime suggest that the substrate is free from metal contamination with continuous operations.
引用
收藏
页码:1614 / 1622
页数:9
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