共 50 条
[21]
High-k dielectrics for use as ISFET gate oxides
[J].
PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3,
2004,
:677-680
[22]
Soft breakdown phenomena in high-K gate dielectrics
[J].
PHYSICS AND TECHNOLOGY OF HIGH-K GATE DIELECTRICS II,
2004, 2003 (22)
:307-318
[24]
Selective wet etching of high-k gate dielectrics
[J].
ULTRA CLEAN PROCESSING OF SILICON SURFACES V,
2003, 92
:129-132
[26]
Performance Enhancement of FinFET Devices with Gate-Stack (GS) High-K Dielectrics for Nanoscale Applications
[J].
Silicon,
2018, 10
:2419-2429
[27]
Interface Engineering for High-k/Ge Gate Stack
[J].
2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4,
2008,
:1244-1247
[28]
CMOS integration issues with high-k gate stack
[J].
IPFA 2004: PROCEEDINGS OF THE 11TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS,
2004,
:17-20