A Photonic Silicon Waveguide Gas Sensor Using Evanescent-Wave Absorption

被引：0

作者：

Ranacher, Christian ^{[1
]}

Consani, Cristina ^{[1
]}

Hedenig, Ursula ^{[2
]}

Grille, Thomas ^{[2
]}

Lavchiev, Ventsislav ^{[3
]}

Jakoby, Bernhard ^{[3
]}

机构：

[1] Carinthian Tech Res AG, Villach, Austria

[2] Infineon Technol Austria AG, Villach, Austria

[3] Johannes Kepler Univ Linz, Inst Microelect & Microsensors, Linz, Austria

来源：

2016 IEEE SENSORS | 2016年

关键词：

Integrated Silicon Photonics; Optical Gas Sensing; Silicon Waveguide; Evanescent-Wave Absorption;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present an evanescent-wave absorption sensor for gas detection using a silicon slab waveguide fabricated in MEMS technology. We demonstrate the feasibility for measuring CO2 concentrations quantitatively with the used sensor structure. Furthermore, spectroscopic measurements show the capability of the sensor to resolve the rotational-vibrational structure of the CO2 absorption band.

引用

页数：3