Photon Crosstalk in pixel array for X-ray imaging

被引：0

作者：

Kim, Myung Soo ^{[1
]}

Kim, Giyoon ^{[1
]}

Kang, Dong-uk ^{[1
]}

Lee, Daehee ^{[1
]}

Cho, Gyuseong ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Nucl & Quantum Engn, 291 Daehak Ro, Taejon 305701, South Korea

来源：

HARD X-RAY, GAMMA-RAY, AND NEUTRON DETECTOR PHYSICS XVI | 2014年 / 9213卷

关键词：

Spatial crosstalk; X-ray image sensor; Semiconductor array device; Large-area CMOS image sensor; Indirect X-ray sensor;

D O I：

10.1117/12.2064329

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A large-area X-ray CMOS image sensor (LXCIS) is widely used in mammography, non-destructive inspection, and animal CT. For LXCIS, in spite of weakness such as low spatial and energy resolution, a Indirect method using scintillator like CsI(Tl) or Gd2O2S is still well-used because of low cost and easy manufacture. A photo-diode for X-ray imaging has large area about 50 similar to 200 um as compared with vision image sensors. That is because X-ray has feature of straight and very small light emission of a scintillator. Moreover, notwithstanding several structure like columnar, the scintillator still emit a diffusible light. This diffusible light from scintillator can make spatial crosstalk in X-ray photo-diode array because of a large incidence angle. Moreover, comparing with vision image sensors, X-ray sensor doesn't have micro lens for gathering the photons to photo-diode. In this study, we simulated the affection of spatial crosstalk in X-ray sensor by comparing optical sensor. Additionally, the chip, which was fabricated in 0.18 um 1P5M process by Hynix in Korea, was tested to know the effect of spatial crosstalk by changing design parameters. From these works, we found out that spatial crosstalk is affected by pixel pitch, incident angle of photons, and micro lens on each pixels.

引用

页数：6

共 10 条

[1] Crosstalk and microlens study in a color CMOS image sensor [J].