共 24 条
[2]
BEAMSON G, 1988, J PHYS SCR, V23, P249
[8]
Investigation of low temperature SiO2 plasma enhanced chemical vapor deposition
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1996, 14 (02)
:738-743
[10]
HOLM R, 1977, KUNSTSTOFFE, V67, P717