Microfocus-infrared synchrotron ellipsometer for mapping of ultra thin films

被引：7
作者：
Gensch, M.
Korte, E. H.
Esser, N.
Schade, U.
Hinrichs, K.
机构：
[1] Inst Analyt Sci, ISAS, Dept Berlin, D-12489 Berlin, Germany
[2] Inst Analyt Sci, ISAS, D-44139 Dortmund, Germany
[3] Berliner Elektronenspeicherring Gesell Synchrotro, D-12589 Berlin, Germany
来源：
INFRARED PHYSICS & TECHNOLOGY | 2006年 / 49卷 / 1-2期
关键词：
organic thin films; infrared; ellipsometry; synchrotron radiation; silicon; anisotropy; polymer; mapping;
D O I：
10.1016/j.infrared.2006.01.007
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A purpose-build infrared spectroscopic ellipsometer is presented that enables to investigate sample areas of less than 1 mm(2) with monolayer sensitivity. This sensitivity is achieved for films on metallic as well as on semiconducting substrates. Measurement principle and performance of the instrument are discussed on selected examples and an outline of the currently performed upgrading of the set-up is given. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：74 / 77
页数：4
相关论文
共 32 条
[1]  
Azzam R.M.A., 1977, Ellipsometry and Polarized Light
[2]  
BEATTIE JR, 1955, PHILOS MAG, V46, P245
[3]   INFRARED ELLIPSOMETRY STUDY OF THE VIBRATIONAL PROPERTIES OF A-SI-H, A-SIC-H AND A-SIGE-H ULTRATHIN FILMS [J].
BENFERHAT, R ;
DREVILLON, B .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 :835-838
[4]   Far-infrared ellipsometry using a synchrotron light source -: the dielectric response of the cuprate high Tc superconductors [J].
Bernhard, C ;
Humlícek, J ;
Keimer, B .
THIN SOLID FILMS, 2004, 455 :143-149
[5]   Josephson plasma resonance and phonon anomalies in trilayer Bi2Sr2Ca2Cu3O10 -: art. no. 277001 [J].
Boris, AV ;
Munzar, D ;
Kovaleva, NN ;
Liang, B ;
Lin, CT ;
Dubroka, A ;
Pimenov, AV ;
Holden, T ;
Keimer, B ;
Mathis, YL ;
Bernhard, C .
PHYSICAL REVIEW LETTERS, 2002, 89 (27)
[6]   ELLIPSOMETRIC DETERMINATION OF SPECTRA OF ADSORBED MOLECULES [J].
DIGNAM, MJ ;
RAO, B ;
MOSKOVIT.M ;
STOBIE, RW .
CANADIAN JOURNAL OF CHEMISTRY, 1971, 49 (07) :1115-&
[7]  
DIGNAM MJ, 1981, APPL SPECTROSC, V28, P156
[8]   APPLICATIONS OF IR ELLIPSOMETRIC SPECTROSCOPY TO SURFACE STUDIES [J].
FEDYK, JD ;
MAHAFFY, P ;
DIGNAM, MJ .
SURFACE SCIENCE, 1979, 89 (1-3) :404-424
[9]   Molecule-solid interfaces studied with infrared ellipsometry:: Ultrathin nitrobenzene films [J].
Gensch, M ;
Roodenko, K ;
Hinrichs, K ;
Hunger, R ;
Güell, AG ;
Merson, A ;
Schade, U ;
Shapira, Y ;
Dittrich, T ;
Rappich, J ;
Esser, N .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (04) :1838-1842
[10]   Instrumentation for FT-IR reflection spectroscopy with synchrotron radiation [J].
Gensch, M ;
Hinrichs, K ;
Röseler, A ;
Korte, EH ;
Schade, U .
ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2003, 376 (05) :626-630
1234