X-Ray Photoelectron Spectroscopy - Methodology and Application

被引:0
作者
Papis-Polakowska, E. [1 ]
White, R. G. [2 ]
Deeks, C. [2 ]
Mannsberger, M. [2 ]
Krajewska, A. [3 ]
Strupinski, W. [3 ]
Plocinski, T. [4 ]
Jankowska, O. [5 ]
机构
[1] Inst Electr Mat Technol, PL-02668 Warsaw, Poland
[2] Thermo Fisher Sci, Waltham, MA 02454 USA
[3] Inst Elect Mat Technol, PL-01919 Warsaw, Poland
[4] Warsaw Univ Technol, Fac Mat Sci & Engn, PL-02507 Warsaw, Poland
[5] COMEF, PL-40719 Katowice, Poland
关键词
GRAPHENE;
D O I
10.12693/APhysPolA.125.1061
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The crucial measurements aspects of X-ray photoelectron spectroscopy, such as chemical state analysis, depth profiling, mapping, and thickness calculation have been presented. The metal alloys, Ti2O5, graphene and type-II InAs/GaSb superlattice structures have been examined by using the new Thermo Scientific K-Alpha X-ray Photoelectron Spectrometer.
引用
收藏
页码:1061 / 1064
页数:4
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