EFFECT OF SPECIMEN SIZE ON YOUNG'S MODULUS OF ELECTRODEPOSITED Ni

被引：2

作者：

Wang, Hong ^{[1
]}

Liu, Rui ^{[1
]}

Mao, Sheng-Ping ^{[1
]}

Tang, Jun ^{[1
]}

Zhang, Cong-Chun ^{[1
]}

Ding, Gui-Fu ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Key Lab Thin Film & Microfabricat Technol, Res Inst Micro Nano Sci & Technol, Natl Key Lab Micro Nano Fabricat Technol,Minist E, Shanghai 200240, Peoples R China

来源：

SURFACE REVIEW AND LETTERS | 2009年 / 16卷 / 02期

基金：

国家高技术研究发展计划(863计划);

关键词：

Specimen size; Young's modulus; electrodeposited Ni; MEMS;

D O I：

10.1142/S0218625X09012639

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The Young's moduli of electrodeposited Ni with different dimensions were measured carefully in this paper. The dimensions of tensile specimens were 200, 35, or 5 mu m thick and 2400, 200 or 50 mu m wide. These specimens were measured with three different approaches. The measured Young's moduli of Ni decrease from 122.1 +/- 4.3 to 92 +/- 5.2 GPa when the thickness changes from 200 to 5 mu m and width changes from 2400 to 50 mu m.

引用

页码：303 / 307

页数：5

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