Long-term stability of single-crystal silicon microresonators

被引：31
作者：
Koskenvuori, M
Mattila, T
Häärä, A
Kiihamäki, J
Tittonen, I
Oja, A
Seppä, H
机构：
[1] Aalto Univ, Metrol Res Inst, FIN-02015 Helsinki, Finland
[2] VTT Informat Technol, FIN-02044 Espoo, Finland
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 115卷 / 01期
关键词：
aging; micromechanical resonator; long-term stability; packaging; vacuum encapsulation;
D O I：
10.1016/j.sna.2004.03.013
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (f(r) similar to 13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity. (C) 2004 Elsevier B.V. All rights reserved.
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收藏
页码：23 / 27
页数：5
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