Crystallization of BaTiO3 thin films prepared by metalorganic decomposition with hydrothermal treatment at 140°C

BaTiO3 (BTO) thin films with perovskite structure have been prepared on Pt/Ti/SiO2/Si substrates using a combined process of a conventional MOD (metal organic decomposition) process and a hydrothermal treatment. The BTO thin films with polycrystalline structure are grown on Pt/Ti/SiO2/Si substrates at a processing temperature of 140degreesC. The structural development, stoichiometry, spectroscopic, and dielectric properties of the BTO thin films have been systematically investigated. X-ray diffraction patterns show that well-developed crystallites with a pure perovskite phase have been formed. ICP (Inductively coupled plasma) and XPS (x-ray photoelectron spectroscopy) results show that stoichiometric BTO thin films were obtained.