PHASE LOCK LOOP BASED TEMPERATURE COMPENSATION FOR MEMS OSCILLATORS

被引：14

作者：

Salvia, J. ^{[1
]}

Melamud, R. ^{[1
]}

Chandorkar, S. ^{[1
]}

Lee, H. K. ^{[1
]}

Qu, Y. Q. ^{[1
]}

Lord, S. F. ^{[1
]}

Murmann, B. ^{[1
]}

Kenny, T. W. ^{[1
]}

机构：

[1] Stanford Univ, Stanford, CA 94305 USA

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

D O I：

10.1109/MEMSYS.2009.4805469

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a new temperature compensation system for microresonator based frequency references. It consists of a phase lock loop whose inputs are derived from two microresonators with different temperature coefficients of frequency. The resonators are suspended within an encapsulated cavity and are heated to constant temperature by the phase lock loop controller, thereby achieving active temperature compensation. We show repeated real-time measurements of two prototypes which achieve frequency stability of better than plusmn +/- 1 ppm from -20 degrees C to + 80 degrees C without calibration look-up tables and plusmn +/- 0.05 ppm with calibration.

引用

页码：661 / 664

页数：4

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