Effect of MoS2 on tribological properties and corrosion resistance of MoS2/a-C:H films fabricated via reactive magnetron sputtering technology

The single-function protective coating does not meet the mechanical requirements. Herein,we have designed a film with excellent anti-wear and anti-corrosion properties to provide adequate protection for the machine. The MoS2/a-C:H films with low friction coefficient and anti-corrosion were successfully prepared by sputtering MoS2 target under different CH4 flow rates via the reactive direct-current magnetron sputtering. The composition, microstructure, tribological properties and corrosion resistance of as-prepared films were systemically studied using various analytical techniques. The results showed that the MoS2/a-C:H films could have typical nanocrystalline/amorphous characteristics. As the CH4 flow rate increased, the C content increased while MoS2 content exhibited an opposite law for the MoS2/a-C:H films. When the CH4 flow rate was 12 sccm, the as-prepared MoS2/a-C:H films could exhibit superior tribological performances with the friction coefficient of 0.02 and wear rate of 0.34 x 10(-7) mm 3 Nm(-1) under atmospheric environment. Also, the film deposited at CH4 flow rate of 12 sccm presented superior corrosion resistance with the corrosion current density of 8.62 x 10(-8) A . cm(-2) after immersed in 3.5 wt% NaCl solution for 24 h. These results indicated that the as-prepared MoS2/a-C:H films might have broad prospects for expanding the applications as protection materials due to their low friction coefficient and excellent corrosion resistance.