ULIS 2009: 10TH INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION OF SILICON
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2009年
关键词:
VOLUME INVERSION;
DG;
D O I:
10.1109/ULIS.2009.4897606
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
In this paper, an efficient non-iterative approach for calculating the threshold voltage of the nanoscale double gate nMOSFET is presented. First, it is shown that the parabolic potential is a reasonable approximation for the body potential along the coordinate normal to the interfaces at the threshold of conduction. Then, the energies of confined carriers are determined by solving the Schrodinger's equation using the WKB approximation. All the coefficients of the potential polynomial are represented analytically in the threshold condition. To assess the accuracy of the proposed model, its predictions have been compared to the results of a numerical simulator and a previously published model. It is also observed that the approach can he extended to an iterative threshold voltage model for 4-terminal fully depleted SOI structures with intrinsic or doped body.