Growth of thick MOD-derived CeO2-x buffer layer with less residual carbon for coated conductors

被引:1
作者
Wang, H. [1 ,2 ]
Cao, L. Y. [1 ]
Wang, Y. [2 ]
Jin, L. H. [2 ]
Liu, J. Y. [2 ]
Huang, J. F. [1 ]
Li, C. S. [2 ]
Yu, Z. M. [2 ]
Zhang, P. X. [2 ]
机构
[1] Shaanxi Univ Sci & Technol, Xian 710012, Peoples R China
[2] Northwest Inst Nonferrous Met Res, Xian 710016, Peoples R China
基金
对外科技合作项目(国际科技项目);
关键词
CHEMICAL SOLUTION DEPOSITION; FILMS; STRESS; SRTIO3;
D O I
10.1007/s10854-015-3577-z
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
120 nm thick CeO2-x buffer layer with less residual carbon has been prepared on biaxially textured NiW substrate using a newly developed heat-treatment route by a metal organic deposition approach. The thickness enhancement of CeO2-x buffer layer was achieved by multiple coatings. The residual carbon removal in CeO2-x buffer layer was realized by introducing CO2 into annealing atmosphere at the post-annealed step. Various characteristic methods, including X-ray diffraction, X-ray photoelectron spectra, emission scanning electron microscopy and atomic force microscopy analyses techniques have been applied to investigate the performance of CeO2-x film. The results show that thick high-quality textured CeO2-x film with smooth and crack-free surface has been produced at annealing temperature below 1000 A degrees C. Furthermore, the atomic concentration of C in such thick CeO2-x buffer layer prepared using the post-annealed step by introducing CO2 into annealing atmosphere is obviously less than that in CeO2-x film fabricated in reducing atmosphere of Ar-4 % H-2. In addition, the introduction of CO2 into post-annealing step is helpful to the decrease of oxygen vacancy defects in CeO2-x film, which can suppress the generation of cracks in film. It suggests that CeO2-x film fabricated by the newly developed heat-treatment route is proved to be a strong candidate as a buffer layer used for the further growth of the oxide film in coated conductors.
引用
收藏
页码:8949 / 8953
页数:5
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