Six-axis force-torque sensor with a large range for biomechanical applications

被引：31

作者：

Brookhuis, R. A. ^{[1
]}

Droogendijk, H. ^{[1
]}

de Boer, M. J. ^{[1
]}

Sanders, R. G. P. ^{[1
]}

Lammerink, T. S. J. ^{[1
]}

Wiegerink, R. J. ^{[1
]}

Krijnen, G. J. M. ^{[1
]}

机构：

[1] Univ Twente, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2014年 / 24卷 / 03期

关键词：

force sensor; capacitive; six-axis; shear force; moment; TACTILE SENSOR; SILICON; FABRICATION;

D O I：

10.1088/0960-1317/24/3/035015

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A silicon six-axis force-torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive read-out is used to detect all axial force components and all torque components simultaneously. Small electrode gaps in combination with mechanical amplification by the sensor structure result in a high sensitivity. The miniature sensor has a wide force range of up to 50 N in normal direction, 10 N in shear direction and 25 N mm of maximum torque around each axis.

引用

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