Design and fabrication of surface-micromachined spherical mirrors

被引：0

作者：

Hou, MTK ^{[1
]}

Liao, KM ^{[1
]}

Yeh, HZ ^{[1
]}

Hong, PY ^{[1
]}

Chen, RS ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 300, Taiwan

来源：

2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST | 2002年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel reflective surface-micromachined spherical mirror (SMSM), which can be used for focusing, collecting and imaging without chromatic aberration and can be easily integrated into the micro optical bench, has been designed, fabricated and characterized.

引用

页码：195 / 196

页数：2