Morphology Control of Nanotube Arrays

被引：49

作者：

Huang, Zhifeng ^{[1
]}

Harris, Kenneth D. ^{[2
]}

Brett, Michae J. ^{[1
,2
]}

机构：

[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 2V4, Canada

[2] Natl Res Council Canada, Natl Inst Nanotechnol, Edmonton, AB T6G 2M9, Canada

来源：

ADVANCED MATERIALS | 2009年 / 21卷 / 29期

关键词：

TITANIA NANOTUBES; SILICON NANOTUBES; THIN-FILMS; FABRICATION; NANOSTRUCTURES; NANOMATERIALS; NANOWIRES; SCIENCE;

D O I：

10.1002/adma.200900269

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Arrays of silicon nanotubes; (SiNTs) with controllable architectures, wall thicknesses and crystallinity are fabricated by a new template-assisted technique. The method includes a sequence of glancing angle deposition of the templates, low-pressure CVD shell-Si coating, ion-milling to expose the templates, and wet-chemical etching for template removal. The technique may be generally adapted to a wide variety of morphologies and NT materials.

引用

页码：2983 / +

页数：6

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