Dual-Stage Nanopositioning for High-Speed Scanning Probe Microscopy

被引：66

作者：

Tuma, Tomas ^{[1
,2
]}

Haeberle, Walter ^{[1
]}

Rothuizen, Hugo ^{[1
]}

Lygeros, John ^{[2
]}

Pantazi, Angeliki ^{[1
]}

Sebastian, Abu ^{[1
]}

机构：

[1] IBM Res Zurich, CH-8803 Ruschlikon, Switzerland

[2] Swiss Fed Inst Technol, Automat Control Lab, CH-8092 Zurich, Switzerland

来源：

IEEE-ASME TRANSACTIONS ON MECHATRONICS | 2014年 / 19卷 / 03期

关键词：

Atomic force microscopy (AFM); control design; mechatronics; nanopositioning; ATOMIC-FORCE MICROSCOPY; DESIGN; IDENTIFICATION; TRACKING; DENSITY; TUBE;

D O I：

10.1109/TMECH.2013.2266481

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents a dual-stage approach to nanopositioning in which the tradeoff between the scanner speed and range is addressed by combining a slow, large-range scanner with a short-range scanner optimized for high-speed, high-resolution positioning. We present the design, finite-element simulations, and experimental characterization of a fast custom-built short-range scanner. The short-range scanner is based on electromagnetic actuation to provide high linearity, has a clean, high-bandwidth dynamical response and is equipped with a low-noise magnetoresistance-based sensor. By using advanced noise-resilient feedback controllers, the dual-stage system allows large-range positioning with subnanometer closed-loop resolution over a wide bandwidth. Experimental results are presented in which the dual-stage scanner system is used for imaging in a custom-built atomic force microscope.

引用

页码：1035 / 1045

页数：11

共 41 条

[1] Curve tracking for rapid imaging in AFM [J].

Andersson, Sean B. .

IEEE TRANSACTIONS ON NANOBIOSCIENCE, 2007, 6 (04) :354-361

[2] High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes [J].

Ando, Toshio ;

Uchihashi, Takayuki ;

Fukuma, Takeshi .

PROGRESS IN SURFACE SCIENCE, 2008, 83 (7-9) :337-437

[3] SINGLE-TUBE 3-DIMENSIONAL SCANNER FOR SCANNING TUNNELING MICROSCOPY [J].

BINNIG, G ;

SMITH, DPE .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (08) :1688-1689

[4] Position Control in Lithographic Equipment An Enabler for Current-Day Chip Manufacturing [J].

Butler, Hans .

IEEE CONTROL SYSTEMS MAGAZINE, 2011, 31 (05) :28-47

[5]

Chen B., 2010, HARD DISK DRIVE SERV

[6] 29.5-Gb/in2 Recording Areal Density on Barium Ferrite Tape [J].

Cherubini, Giovanni ;

Cideciyan, Roy D. ;

Dellmann, Laurent ;

Eleftheriou, Evangelos ;

Haeberle, Walter ;

Jelitto, Jens ;

Kartik, Venkataraman ;

Lantz, Mark A. ;

Oelcer, Sedat ;

Pantazi, Angeliki ;

Rothuizen, Hugo E. ;

Berman, David ;

Imaino, Wayne ;

Jubert, Pierre-Olivier ;

McClelland, Gary ;

Koeppe, Peter V. ;

Tsuruta, Kazuhiro ;

Harasawa, Takeshi ;

Murata, Yuto ;

Musha, Atsushi ;

Noguchi, Hitoshi ;

Ohtsu, Hiroki ;

Shimizu, Osamu ;

Suzuki, Ryota .

IEEE TRANSACTIONS ON MAGNETICS, 2011, 47 (01) :137-147

[7] Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application [J].

Croft, D ;

Shed, G ;

Devasia, S .

JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 2001, 123 (01) :35-43

[8] A survey of control issues in nanopositioning [J].

Devasia, Santosh ;

Eleftheriou, Evangelos ;

Moheimani, S. O. Reza .

IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2007, 15 (05) :802-823

[9] Millipede -: A MEMS-based scanning-probe data-storage system [J].

Eleftheriou, E ;

Antonakopoulos, T ;

Binnig, GK ;

Cherubini, G ;

Despont, M ;

Dholakia, A ;

Dürig, U ;

Lantz, MA ;

Pozidis, H ;

Rothuizen, HE ;

Vettiger, P .

IEEE TRANSACTIONS ON MAGNETICS, 2003, 39 (02) :938-945

[10] Optimal Periodic Trajectories for Band-Limited Systems [J].

Fleming, A. J. ;

Wills, A. G. .

IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2009, 17 (03) :552-562

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