Optical characterization of alcohol-infiltrated one-dimensional silicon photonic crystals

被引：7

作者：

Barillaro, Giuseppe ^{[2
]}

Merlo, Sabina ^{[1
]}

Strambini, Lucanos M. ^{[2
]}

机构：

[1] Univ Pavia, Dipartimento Elettron, I-27100 Pavia, Italy

[2] Univ Pisa, Dipartimento Ingn Informaz Elettron Informat Tele, I-56126 Pisa, Italy

来源：

OPTICS LETTERS | 2009年 / 34卷 / 12期

关键词：

Photonic crystals - Numerical methods - Photonic devices - Refractive index - Silicon photonics;

D O I：

10.1364/OL.34.001912

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this work, experimental results on the optical characterization of alcohol-infiltrated silicon/air one-dimensional photonic crystals (1D-PhCs), fabricated by electrochemical micromachining of silicon, are presented. The spectral reflectivity of high-order hybrid 1D-PhCs with a spatial period of 8 mu m was measured, in the wavelength range 1.0-1.7 mu m, when alcohols (ethanol and isopropanol) substitute air inside the trenches. A reliable redshift is observed in the presence of alcohols, with respect to air, which allows one to discriminate the refractive index difference between the alcohols. Experimental data are in good agreement with numerical results calculated by using the characteristic matrix method, modified to take into account surface roughness of silicon walls. (C) 2009 Optical Society of America

引用

页码：1912 / 1914

页数：3

共 8 条

[1] Electrochemical etching in HF solution for silicon micromachining [J].