Tensile stress of thin ceramic layers measured by Fizeau interferometry

被引：0

作者：

Pochmon, Michal ^{[1
,2
]}

Rossler, Tomas ^{[3
]}

Hrabovsky, Miroslav ^{[4
]}

Dellert, Armin ^{[5
]}

Hybl, Ondrej ^{[6
]}

Haeusler, Gerd ^{[6
]}

机构：

[1] Palacky Univ, Joint Lab Opt, 17 Listopadu 50a, Olomouc 77207, Czech Republic

[2] Acad Sci Czech Republic, Inst Phys, Olomouc 77207, Czech Republic

[3] Palacky Univ, Fac Sci, Olomouc 77146, Czech Republic

[4] Palacky Univ, Reg Ctr Adv Technol & Mat, Olomouc 77207, Czech Republic

[5] Friedrich Alexander Univ Erlangen Nuremberg, Dept Mat Sci Glass & Ceram 3, D-91058 Erlangen, Germany

[6] Univ Erlangen Nurnberg, Inst Opt, D-91508 Erlangen, Germany

来源：

EXPERIMENTALNI ANALYZA NAPETI - EXPERIMENTAL STRESS ANALYSIS | 2011年

关键词：

Tensile stress; Thin coating; Fizeau interferometry;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

We introduce a method to measure stress of thin ceramic slurry layers, while they are drying on a substrate with known parameters. The method exploits the bending of the substrate, which is measured bye Fizeau interferometry.

引用

页码：321 / 324

页数：4