Influences of ultraviolet irradiation on structure and tribological properties of diamond-like carbon films

被引:27
作者
Ji, Li [1 ,2 ]
Li, Hongxuan [1 ]
Zhao, Fei [1 ,2 ]
Quan, Weilong [1 ,2 ]
Chen, Jianmin [1 ]
Zhou, Huidi [1 ]
机构
[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[2] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
关键词
Diamond-like carbon; UV irradiation; Structure; Tribological properties; AMORPHOUS-CARBON; RAMAN; HYDROGEN;
D O I
10.1016/j.apsusc.2009.05.143
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Two types of diamond-like carbon (DLC) films with different bonding configurations were produced by pulse-assisted and DC-assisted plasma chemical vapor deposition. The chemical composition, surface morphology, microstructure, internal stress and tribological properties of the two films before and after the ultraviolet (UV) irradiation were investigated and compared. It was found that the UV irradiation had little effects on the chemical composition and surface morphology of both the films, but greatly influenced their tribological properties in the opposite trends. This result was attributed to the different changing outcomes of the bonding configuration induced by the UV actions of primary photodissociation and secondary recombination, wherein the inherent bonding configuration and internal stress played important roles. (C) 2009 Elsevier B. V. All rights reserved.
引用
收藏
页码:8409 / 8413
页数:5
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