ION BEAM-ASSISTED DEPOSITION TECHNOLOGY AS A METHOD OF NANOCRYSTALLINE COATING FORMATION

被引：0
作者：
Guglya, A. G. [1 ]
Marchenko, I. G. [1 ]
机构：
[1] Kharkov Inst Phys & Technol, Natl Sci Ctr, Kharkov, Ukraine
来源：
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2014年 / 02期
关键词：
CHROMIUM NITRIDE FILMS; CR-N COATINGS; MECHANICAL-PROPERTIES; WEAR; MICROSTRUCTURE; BOMBARDMENT; CORROSION; ADHESION; STRESSES; METALS;
D O I：
暂无
中图分类号：
O57 [原子核物理学、高能物理学];
学科分类号：
070202 ;
摘要：
This scientific paper describes the structure, phase composition and mechanical properties of nanocrystalline coatings obtained using the ion beam-assisted deposition technology. The results of computer simulation of IBAD processes for different energy values of bombarding ions and for relationships between the densities of ion fluxes and metal deposition rates is given. The data of electron-microscope analysis of the initial stages of film structure formation (of 5 nm thick and more) is presented. And finally we demonstrate the influence produced by the ion energy and ion current density on the formation of nanocrystalline structure and its correlation with tribological properties of coatings.
引用
收藏
页码：125 / 136
页数：12
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