A simple and efficient dynamic modelling method for compliant micropositioning mechanisms using flexure hinges

被引:22
作者
Handley, DC [1 ]
Lu, TF [1 ]
Yong, YK [1 ]
Zhang, WJ [1 ]
机构
[1] Univ Adelaide, Sch Mech Engn, Adelaide, SA 5005, Australia
来源
DEVICE AND PROCESS TECHNOLOGIES FOR MEMS, MICROELECTRONICS, AND PHOTONICS III | 2004年 / 5276卷
关键词
micropositioning; compliant mechanism; flexure hinge; linear dynamic model; parallel mechanism; four-bar linkage;
D O I
10.1117/12.523573
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper we consider the dynamic modelling of compliant micropositioning mechanisms using flexure hinges. A simple modelling method is presented that is particularly useful for modelling parallel micropositioning mechanisms. This method is based upon linearisation of the geometric constraint equations of the compliant mechanism. This results in a linear kinematic model, a constant Jacobian and linear dynamic model. To demonstrate the computational simplicity of this methodology it is applied to a four-bar linkage using flexure hinges. Comparisons are made between the simple dynamic model and a complete non-linear model derived using the Lagrangian method. The investigation reveals that this new model is accurate yet computationally efficient and simple to use. The method is then further applied to a parallel 3-degree of freedom (dof) mechanism. It is shown that the method can be simply applied to this more complex parallel mechanism. A dynamic model of this mechanism is desired for use in optimal design and for controller design.
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页码:67 / 76
页数:10
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