Sputtered molybdenum oxide thin films for NH3 detection

被引：101
作者：
Mutschall, D
Holzner, K
Obermeier, E
机构：
[1] Technical University of Berlin, Microsensor and Actuator Technology, Sekr. TIB 3.1, D-13355 Berlin
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 36卷 / 1-3期
关键词：
gas sensor; metal oxide; molybdenum trioxide; reactive sputtering;
D O I：
10.1016/S0925-4005(97)80089-5
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Thin films of MoO3 for gas sensing applications have been deposited by reactive sputtering using a metallic molybdenum target. After annealing at 500 degrees C in air, the layers consist of rhombic molybdenum trioxide with a (010) texture. The morphology of the layers considerably depends on the film thickness. Electrical conductivity measurements with different test gases show that MoO3 layers are suitable for NH3 detection at operating temperatures between 400 and 450 degrees C.
引用
收藏
页码：320 / 324
页数：5
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