Large voltage modulation in magnetic field sensors from two-dimensional arrays of Y-Ba-Cu-O nano Josephson junctions

被引:31
作者
Cybart, Shane A. [1 ,2 ]
Cho, E. Y. [1 ]
Wong, T. J. [1 ]
Glyantsev, V. N. [3 ]
Huh, J. U. [3 ]
Yung, C. S. [3 ]
Moeckly, B. H. [3 ]
Beeman, J. W. [2 ]
Ulin-Avila, E. [2 ]
Wu, S. M. [2 ]
Dynes, R. C. [1 ,2 ]
机构
[1] Univ Calif San Diego, Dept Phys, La Jolla, CA 92093 USA
[2] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
[3] Superconductor Technol Inc, Santa Barbara, CA 93111 USA
关键词
EDGE JUNCTIONS; ION DAMAGE; RF SQUIDS; DC SQUIDS; YBA2CU3O7-DELTA; FILMS; FABRICATION; PAIRS;
D O I
10.1063/1.4865216
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have fabricated and tested two-dimensional arrays of YBa2Cu3O7-delta superconducting quantum interference devices. The arrays contain over 36 000 nano Josephson junctions fabricated from ion irradiation of YBa2Cu3O7-delta through narrow slits in a resist-mask that was patterned with electron beam lithography and reactive ion etching. Measurements of current-biased arrays in magnetic field exhibit large voltage modulations as high as 30mV. (C) 2014 AIP Publishing LLC.
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页数:3
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