Ion beam induced epitaxial crystallization of SrTiO3

被引：1
作者：
Oyoshi, K
Hishita, S
Suehara, S
Aizawa, T
Haneda, H
机构：
[1] Natl. Inst. for Res. in Inorg. Mat., Tsukuba, Ibaraki 305, 1-1, Namiki
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1997年 / 121卷 / 1-4期
关键词：
D O I：
10.1016/S0168-583X(96)00389-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The epitaxial crystallization of amorphous SrTiO3 on single crystal SrTiO3 (100) has been induced by ion irradiation at temperature range of 70-230 degrees C. Rutherford backscattering spectrometry and ion channeling were used to evaluate the crystallization. The contribution of thermally induced solid phase epitaxial crystallization (SPEC) is negligible at temperatures used in the present experiments. The crystallization is attributed to ion beam induced epitaxial crystallization (IBIEC), and is characterized by an activation energy of 0.2 eV. This value is about 1/5 relative to that of solid phase epitaxial crystallization (SPEC). As to the dependence of IBIEC on impurities, a retarded IBIEC has been observed in Nb-doped SrTiO3.
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页码：184 / 186
页数：3
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