A Novel Stress Characterization Technique for the Development of Low-Stress Ohmic Contacts to HgCdTe

被引:3
作者
D'Orsogna, D. [1 ]
Lamarre, P. [2 ,3 ]
Bellotti, E. [1 ]
Barbone, P. E. [4 ]
Smith, F. [2 ]
Fulk, C. [3 ]
Lovecchio, P. [3 ]
Reine, M. B. [3 ]
Tobin, S. P. [3 ]
Markunas, J. [5 ]
机构
[1] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA
[2] Photronix Inc, Burlington, MA 01803 USA
[3] BAE Syst, Lexington, MA 02421 USA
[4] Boston Univ, Dept Mech Engn, Boston, MA 02215 USA
[5] USA, RDECOM, CERDEC, NVESD, Ft Belvoir, VA 22060 USA
关键词
HgCdTe detectors; ohmic contacts; HgCdTe stress; FILMS; POLYCRYSTALLINE; (HGCD)TE;
D O I
10.1007/s11664-009-0790-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
HgCdTe material intended for long-wavelength infrared detection is particularly susceptible to damage from stress. As a result, an ideal ohmic contact needs to have good adhesion and low specific contact resistance. The contact should act as a diffusion barrier and induce the least amount of stress in the underlying material. In this paper we present a set of stress measurements from different ohmic contact materials deposited on short- and long-wavelength HgCdTe films grown by liquid-phase epitaxy (LPE). Using a new experimental technique we remove the substrate and measure the stress induced on single- and multilayered HgCdTe cantilevers. To interpret our results, we develop a theoretical model that describes the physics of elastic deformation in HgCdTe layers. Our model is based on classical thin-plate bending theory and explicitly takes into account the realistic boundary conditions that are present in the experimental setup by using a variational approach.
引用
收藏
页码:1698 / 1706
页数:9
相关论文
共 20 条
[1]  
Costa P, RECENT RESULTS SOFRA
[2]   DEPOSITION OF THE UNREACTIVE METAL AU ONTO SPUTTERED AND CLEAVED HG1-XCDXTE SURFACES [J].
DAVIS, GD ;
BECK, WA ;
KELLY, MK ;
TACHE, N ;
MARGARITONDO, G .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (09) :3157-3161
[3]   OVERLAYER INTERACTIONS WITH (HGCD)TE [J].
DAVIS, GD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1939-1945
[4]   INTERACTIONS BETWEEN (HGCD)TE AND OVERLAYERS OF INTERMEDIATE REACTIVITY (GE, AG, AND CU) [J].
DAVIS, GD ;
BECK, WA ;
KELLY, MK ;
KILDAY, D ;
MO, YW ;
TACHE, N ;
MARGARITONDO, G .
PHYSICAL REVIEW B, 1988, 38 (14) :9694-9705
[5]   The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer-Weber thin films [J].
Floro, JA ;
Hearne, SJ ;
Hunter, JA ;
Kotula, P ;
Chason, E ;
Seel, SC ;
Thompson, CV .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (09) :4886-4897
[6]  
Fraft O., 2005, DIFFUSION PROCESSES, P365
[7]  
Freund L. B., 2003, THIN FILMMATERIALS S
[8]   THE INTRINSIC STRESS OF POLYCRYSTALLINE AND EPITAXIAL THIN METAL-FILMS [J].
KOCH, R .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1994, 6 (45) :9519-9550
[9]   Characterization of Dislocations in HgCdTe Heteroepitaxial Layers Using a New Substrate Removal Technique [J].
Lamarre, P. ;
Fulk, C. ;
D'Orsogna, D. ;
Bellotti, E. ;
Smith, F. ;
LoVecchio, P. ;
Reine, M. B. ;
Parodos, T. ;
Marciniec, J. ;
Tobin, S. P. ;
Markunas, J. .
JOURNAL OF ELECTRONIC MATERIALS, 2009, 38 (08) :1746-1754
[10]  
LAWSON EHP, 1959, J PHYS CHEM SOLIDS, V9, P325