On the magnetic saturation analyses of a micro linear switched-reluctance motor

被引：11

作者：

Liu, CT ^{[1
]}

Chiang, TS ^{[1
]}

机构：

[1] Natl Sun Yat Sen Univ, Inst Elect Engn, Kaohsiung 80424, Taiwan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2004年 / 40卷 / 04期

关键词：

finite element analysis; microelectromechanical system; saturation; switched-reluctance motor;

D O I：

10.1109/TMAG.2004.830221

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

To achieve low cost and high operational precisions in semiconductor fabrication industry, a new micro linear switched-reluctance motor (muLSRM) that can be integrated with the microelectro-mechanical system (MEMS) processing scheme has been designed and investigated. With both the degraded material property after electroplating process and the geometric constraints of MEMS being considered, magnetic saturation characteristics of the muLSRM were carefully analyzed by three-dimensional finite element analysis. Hence, the generated propulsive, normal, and guidance forces at those of the most feasible motor pole shapes and winding excitation levels can be evaluated to provide a thorough design and fabrication basis.

引用

页码：2861 / 2863

页数：3

共 6 条

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