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Islanding, growth mode and ordering in Si heteroepitaxy on Ge(001) substrates structured by thermal annealing
被引:2
|作者:
Persichetti, L.
[1
]
Fanfoni, M.
[2
]
Bonanni, B.
[2
]
De Seta, M.
[1
]
Di Gaspare, L.
[1
]
Goletti, C.
[2
]
Ottaviano, L.
[3
]
Sgarlata, A.
[2
]
机构:
[1] Univ Roma Tre, Dipartimento Sci, Viale G Marconi 446, I-00146 Rome, Italy
[2] Univ Roma Tor Vergata, Dipartimento Fis, Via Ric Sci 1, I-00133 Rome, Italy
[3] Univ Aquila, Dipartimento Sci Fis & Chim, Laquila, Italy
来源:
关键词:
Silicon;
Germanium;
Semiconductors;
Group IV epitaxy;
Epitaxial growth;
SCANNING-TUNNELING-MICROSCOPY;
GE ISLANDS;
SI(001);
SURFACES;
DIMERS;
D O I:
10.1016/j.susc.2019.02.002
中图分类号:
O64 [物理化学(理论化学)、化学物理学];
学科分类号:
070304 ;
081704 ;
摘要:
Si/Ge heteroepitaxial dots under tensile strain are grown on nanostructured Ge substrates produced by high-temperature flash heating exploiting the spontaneous faceting of the Ge(001) surface close to the onset of surface melting. A very diverse growth mode is obtained depending on the specific atomic structure and step density of nearby surface domains with different vicinal crystallographic orientations. On highly-miscut areas of the Ge (001) substrate, the critical thickness for islanding is lowered to about 5 ML, in contrast to the 11 ML reported for the flat Ge(001) surface, while on unreconstructed (1 x 1) domains the growth is Volmer-Weber driven. An explanation is proposed considering the diverse relative contributions of step and surface energies on misoriented substrates. In addition, we show that the bottom-up pattern of the substrate naturally formed by thermal annealing determines a spatial correlation for the dot sites.
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页码:31 / 37
页数:7
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