Islanding, growth mode and ordering in Si heteroepitaxy on Ge(001) substrates structured by thermal annealing

被引:2
|
作者
Persichetti, L. [1 ]
Fanfoni, M. [2 ]
Bonanni, B. [2 ]
De Seta, M. [1 ]
Di Gaspare, L. [1 ]
Goletti, C. [2 ]
Ottaviano, L. [3 ]
Sgarlata, A. [2 ]
机构
[1] Univ Roma Tre, Dipartimento Sci, Viale G Marconi 446, I-00146 Rome, Italy
[2] Univ Roma Tor Vergata, Dipartimento Fis, Via Ric Sci 1, I-00133 Rome, Italy
[3] Univ Aquila, Dipartimento Sci Fis & Chim, Laquila, Italy
关键词
Silicon; Germanium; Semiconductors; Group IV epitaxy; Epitaxial growth; SCANNING-TUNNELING-MICROSCOPY; GE ISLANDS; SI(001); SURFACES; DIMERS;
D O I
10.1016/j.susc.2019.02.002
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Si/Ge heteroepitaxial dots under tensile strain are grown on nanostructured Ge substrates produced by high-temperature flash heating exploiting the spontaneous faceting of the Ge(001) surface close to the onset of surface melting. A very diverse growth mode is obtained depending on the specific atomic structure and step density of nearby surface domains with different vicinal crystallographic orientations. On highly-miscut areas of the Ge (001) substrate, the critical thickness for islanding is lowered to about 5 ML, in contrast to the 11 ML reported for the flat Ge(001) surface, while on unreconstructed (1 x 1) domains the growth is Volmer-Weber driven. An explanation is proposed considering the diverse relative contributions of step and surface energies on misoriented substrates. In addition, we show that the bottom-up pattern of the substrate naturally formed by thermal annealing determines a spatial correlation for the dot sites.
引用
收藏
页码:31 / 37
页数:7
相关论文
共 50 条
  • [21] Sb-mediated Si heteroepitaxial growth on Ge(001)
    Wang, J
    Li, M
    Altman, EI
    SURFACE SCIENCE, 2004, 560 (1-3) : 12 - 26
  • [22] LOCAL ORDERING AND LATERAL GROWTH OF INITIAL THERMAL OXIDE OF SI(001)
    UDAGAWA, M
    NIWA, M
    SUMITA, I
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (1B): : 375 - 378
  • [23] Improvement of crystallinity by post-annealing and regrowth of Ge layers on Si substrates
    Oda, Katsuya
    Tani, Kazuki
    Saito, Shin-ichi
    Ido, Tatemi
    THIN SOLID FILMS, 2014, 550 : 509 - 514
  • [24] Epitaxial growth and crystalline properties of Ge1-x-ySixSny on Ge(001) substrates
    Asano, Takanori
    Terashima, Tatsuya
    Yamaha, Takashi
    Kurosawa, Masashi
    Takeuchi, Wakana
    Taoka, Noriyuki
    Nakatsuka, Osamu
    Zaima, Shigeaki
    SOLID-STATE ELECTRONICS, 2015, 110 : 49 - 53
  • [25] The effect of Ge precursor on the heteroepitaxy of Ge1-xSnx epilayers on a Si (001) substrate
    Jahandar, Pedram
    Weisshaupt, David
    Colston, Gerard
    Allred, Phil
    Schulze, Jorg
    Myronov, Maksym
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2018, 33 (03)
  • [26] Minimum energy path for the nucleation of misfit dislocations in Ge/Si(001) heteroepitaxy
    Trushin, O.
    Maras, E.
    Stukowski, A.
    Granato, E.
    Ying, S. C.
    Jonsson, H.
    Ala-Nissila, T.
    MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING, 2016, 24 (03)
  • [27] Effect of GE deposition rate on growth and optical properties of Ge(Si)/Si(001) self-assembled islands
    Shaleev, MV
    Krasilnik, ZF
    Lobanov, DN
    Novikov, AV
    Vostokov, NLV
    Yablonsky, AN
    2004 INTERNATIONAL SIBERIAN WORKSHOPS AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, EDM 2004, PROCEEDINGS, 2004, : 24 - 26
  • [28] On the role of interdiffusion during the growth of Ge on Si(001) and Si(111)
    Koch, R
    Wassermann, B
    Wedler, G
    DEFECTS AND DIFFUSION IN SEMICONDUCTORS, 2000, 183-1 : 95 - 102
  • [29] Large-area high-quality graphene on Ge(001)/Si(001) substrates
    Pasternak, I.
    Dabrowski, P.
    Ciepielewski, P.
    Kolkovsky, V.
    Klusek, Z.
    Baranowski, J. M.
    Strupinski, W.
    NANOSCALE, 2016, 8 (21) : 11241 - 11247
  • [30] Epitaxial Growth of High Quality Ge Films on Si(001) Substrates by Nanocontact Epitaxy
    Nakamura, Yoshiaki
    Murayama, Akiyuki
    Ichikawa, Masakazu
    CRYSTAL GROWTH & DESIGN, 2011, 11 (07) : 3301 - 3305