Challenges in the realization of a fully integrated optical lab-on-chip

被引:0
|
作者
Nicoletti, S. [1 ]
Barritault, P. [1 ]
Boutami, S. [1 ]
Brun, M. [1 ]
Gliere, A. [1 ]
Labeye, P. [1 ]
Rouxel, J. [1 ]
Czarny, J. [2 ]
Lhermet, H. [2 ]
Carras, M. [3 ]
Maisons, G. [3 ]
机构
[1] Univ Grenoble Alpes, CEA, LET, DOPT SCOOP LCNA, MINATEC Campus 17, F-38054 Grenoble, France
[2] Univ Grenoble Alpes, CEA, LET, DCOS SCMS LCMC, F-38054 Grenoble, France
[3] III V Lab, F-91767 Palaiseau, France
来源
关键词
Optical sensors; Mid-IR photonics; QCL sources; photoacoustic;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents and discusses recent achievements in the realization of a miniaturized optical sensor based on photoacoustic detection and it illustrates the potential of the co-integration of Si-based Photonic Integrated Circuits, IC/MEMS and QCL technologies
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页数:4
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