Underwater shear-stress sensor

被引：14

作者：

Xu, Y ^{[1
]}

Jiang, FK ^{[1
]}

Lin, Q ^{[1
]}

Clendenen, J ^{[1
]}

Tung, S ^{[1
]}

Tai, YC ^{[1
]}

机构：

[1] CALTECH, Pasadena, CA 91125 USA

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984272

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports the development of a micromachined, vacuum-cavity insulated, thermal shear-stress sensor for underwater applications. This paper is focused on the two major challenges for underwater shear-stress sensors: the waterproof coating and pressure sensitivity. It is found that thin-film CVD Parylene is a good waterproof material and sensors coated with 2 mum Parylene N can survive in water for at least one month at 55 degreesC. It is also found that reducing the size and increasing the thickness of the sensor diaphragm are effective in minimizing the pressure sensitivity.

引用

页码：340 / 343

页数：4

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