Geometrical cross-sectional imaging by a heterodyne wavelength-scanning interference confocal microscope

被引：6
|
作者：
Fukano, T
Yamaguchi, I
机构：
[1] Saitama Univ, Grad Sch Sci & Engn, Urawa, Saitama 3388570, Japan
[2] RIKEN, Inst Phys & Chem Res, Opt Engn Lab, Wako, Saitama 3510198, Japan
来源：
OPTICS LETTERS | 2000年 / 25卷 / 08期
关键词：
D O I：
10.1364/OL.25.000548
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We developed a heterodyne interference confocal microscope, using wavelength modulation of a laser diode to realize quick separate measurement of the refractive indices and geometrical thicknesses of multiple layers. This microscope requires only a single axial movement of the specimen. We can display the geometrical cross sections of the interfaces and the refractive indices of a three-layered object. (C) 2000 Optical Society of America. OCIS codes: 040.2840, 120.3180, 120.4630, 170.6960, 180.1790.
引用
收藏
页码：548 / 550
页数：3
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