Geometrical cross-sectional imaging by a heterodyne wavelength-scanning interference confocal microscope

被引：6

作者：

Fukano, T

Yamaguchi, I

机构：

[1] Saitama Univ, Grad Sch Sci & Engn, Urawa, Saitama 3388570, Japan

[2] RIKEN, Inst Phys & Chem Res, Opt Engn Lab, Wako, Saitama 3510198, Japan

来源：

OPTICS LETTERS | 2000年 / 25卷 / 08期

关键词：

D O I：

10.1364/OL.25.000548

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We developed a heterodyne interference confocal microscope, using wavelength modulation of a laser diode to realize quick separate measurement of the refractive indices and geometrical thicknesses of multiple layers. This microscope requires only a single axial movement of the specimen. We can display the geometrical cross sections of the interfaces and the refractive indices of a three-layered object. (C) 2000 Optical Society of America. OCIS codes: 040.2840, 120.3180, 120.4630, 170.6960, 180.1790.

引用

页码：548 / 550

页数：3

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