Preparation of renewable antireflection moth-eye surfaces by nanoimprinting using anodic porous alumina molds

被引：15

作者：

Yanagishita, Takashi ^{[1
]}

Kondo, Toshiaki ^{[1
]}

Masuda, Hideki ^{[1
]}

机构：

[1] Tokyo Metropolitan Univ, Dept Appl Chem, 1-1 Minamiosawa, Hachioji, Tokyo 1920397, Japan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2018年 / 36卷 / 03期

关键词：

LIGHT; REPLICATION; FABRICATION; ARRAYS; MASK;

D O I：

10.1116/1.5016369

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Renewable antireflection surfaces were formed by the lamination of polymer thin films with moth-eye structured surfaces. Moth-eye structures were prepared by nanoimprinting using an anodic porous alumina mold. Thin-film lamination was performed using a photocurable monomer as an adhesive. A renewed low-reflectance moth-eye structured surface could be exposed by peeling the uppermost film from the sample. Published by the AVS.

引用

页数：5