Preparation of renewable antireflection moth-eye surfaces by nanoimprinting using anodic porous alumina molds

被引：15
|
作者：
Yanagishita, Takashi [1 ]
Kondo, Toshiaki [1 ]
Masuda, Hideki [1 ]
机构：
[1] Tokyo Metropolitan Univ, Dept Appl Chem, 1-1 Minamiosawa, Hachioji, Tokyo 1920397, Japan
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2018年 / 36卷 / 03期
关键词：
LIGHT; REPLICATION; FABRICATION; ARRAYS; MASK;
D O I：
10.1116/1.5016369
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Renewable antireflection surfaces were formed by the lamination of polymer thin films with moth-eye structured surfaces. Moth-eye structures were prepared by nanoimprinting using an anodic porous alumina mold. Thin-film lamination was performed using a photocurable monomer as an adhesive. A renewed low-reflectance moth-eye structured surface could be exposed by peeling the uppermost film from the sample. Published by the AVS.
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页数：5
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