Silicon piezoresistive cantilever beam with porous silicon element

被引:0
作者
Domanski, K [1 ]
Tomaszewski, D [1 ]
Grabiec, P [1 ]
Gniazdowski, Z [1 ]
Kudla, A [1 ]
Beck, RB [1 ]
Jakubowski, A [1 ]
Gotszalk, T [1 ]
Rangelow, IW [1 ]
机构
[1] Inst Electr Mat Technol, PL-02668 Warsaw, Poland
来源
PROCEEDINGS OF THE ELEVENTH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES, VOL 1 & 2 | 2002年 / 4746卷
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a highly sensitive nanobalance based on a piezoresistive cantilever beam with porous silicon element. Measurements of a shift of the cantilever resonance frequency allow estimation of adsorbed substance weight (e.g. gas, steam) with single nanogram resolution. Applications of such a device include humidity and gas detection. Besides, cantilever beam with porous silicon element enables combined investigations of mechanical and adsorption properties of porous silicon.
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页码:523 / 526
页数:4
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