Thick Film PZT Transducer Arrays for Particle Manipulation

被引：2

作者：

Qiu, Yongqiang ^{[1
]}

Wang, Han ^{[1
]}

Bolhovitins, Aleksandrs ^{[1
]}

Demore, Christine ^{[1
]}

Cochran, Sandy ^{[1
]}

Gebhardt, Sylvia ^{[2
]}

Schoenecker, Andreas ^{[2
]}

机构：

[1] Univ Dundee, Inst Med Sci & Technol, Dundee, Scotland

[2] Fraunhofer Inst Ceram Technol & Syst, Dresden, Germany

来源：

2013 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2013年

基金：

英国工程与自然科学研究理事会;

关键词：

Thick Film; Screen-printing; 2-D Array; Particle Manipulation; ACOUSTIC RADIATION FORCE; PIEZOELECTRIC PROPERTIES; HIGH-FREQUENCY; STANDING-WAVE; ULTRASOUND;

D O I：

10.1109/ULTSYM.2013.0487

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

This paper reports the fabrication and evaluation of a two-dimensional thick film PZT ultrasonic transducer array operating at about 7.5 MHz for particle manipulation. All layers on the array are screen-printed and sintered on an Al2O3 substrate without further processes or patterning. The measured dielectric constant of the PZT is 2250 +/- 100, and the dielectric loss is 0.09 +/- 0.005 at 10 kHz. Finite element analysis has been used to predict the behaviour of the array and impedance spectroscopy and laser vibrometry have been used to characterise its performance. The measured deflection of a single activate element is on the order of tens of nanometres with 20 V-pp input. Particle manipulation experiments have been performed by coupling the thick film array to a capillary containing polystyrene microspheres in water.

引用

页码：1911 / 1914

页数：4

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