Structure and properties of TiN coatings produced with PIII&D technique using high efficiency rectilinear filter cathodic arc plasma

被引：26

作者：

Akkaya, S. S. ^{[1
]}

Vasyliev, V. V. ^{[2
]}

Reshetnyak, E. N. ^{[2
]}

Kazmanli, K. ^{[1
]}

Solak, N. ^{[1
]}

Strel'nitskij, V. E. ^{[2
]}

Urgen, M. ^{[1
]}

机构：

[1] Istanbul Tech Univ, Dept Met & Mat Engn, TR-34469 Istanbul, Turkey

[2] Kharkov Inst Phys & Technol, Natl Sci Ctr, UA-61108 Kharkov, Ukraine

来源：

SURFACE & COATINGS TECHNOLOGY | 2013年 / 236卷

关键词：

PIII&D; Filtered cathodic arc; TiN; Adhesion; Tribological properties; IMPLANTATION ASSISTED DEPOSITION; EV ION IRRADIATION; PREFERRED ORIENTATION; THIN-FILMS; TEXTURE EVOLUTION; PVD COATINGS; VACUUM-ARC; MICROSTRUCTURE; STRESS; BOMBARDMENT;

D O I：

10.1016/j.surfcoat.2013.10.009

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this study, the effects of pulse bias application during plasma immersion ion implantation and deposition (PIII&D) on the structural, mechanical and tribological properties of TiN coatings are investigated. The coatings produced with the application of pulsed bias showed several distinct changes, depending on the type and magnitude of the bias potential. With increasing pulse bias potential, preferred orientation of crystallite planes parallel to the coating surface, gradually changed from (111) to (220), accompanied by a structural transition from Zone T to Zone 2 type structure. Internal stress levels also showed a dependence on the type of bias and bias potential. The results of wear tests clearly revealed significant improvement of tribological properties with the application of pulsed bias. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：332 / 340

页数：9

共 30 条

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