Low temperature chemical vapor deposition of superconducting vanadium nitride thin films

Superconducting thin films of vanadium nitride have been grown by low temperature (250-300 degrees C) chemical vapor deposition from tetrakis(dimethylamido) vanadium (TDMAV) and ammonia. For example, films grown from TDMAV (1 sccm Ar as carrier gas) and 7 mTorr ammonia at 300 degrees C are nanocrystalline (cubic delta-phase) with an average crystal size of 20 nm, have relatively low room temperature resistivities of 250 mu Omega cm, and are superconducting with critical temperatures as high as 7.6 K (versus a bulk value of 9 K). The films have a V:N ratio of 1: 1, with a carbon content of <5 at.% and an oxygen content of <3 at.% (as determined by high resolution XPS). The V 2p(3/2) and N 1 s XPS binding energies of 513.5 and 397.3 eV, respectively, are consistent with the presence of a nitride phase. In contrast, films grown at lower temperatures <200 degrees C show carbon incorporation, have a much higher resistivity of similar to 3000 mu Omega cm, and are not superconducting. The results suggest that, at low temperatures, the thermally activated transamination reaction with ammonia becomes too slow to remove dimethylamido groups from the surface, resulting in carbon-rich films (10-15 at.% carbon). The conformal step coverage of the VN films depends on the growth conditions. For thermal growth of nonsuperconducting films at 150 degrees C, the step coverage is >95% in trenches of an aspect ratio of 4: 1; for superconducting films grown at 250 degrees C, the step coverage is 65% for an aspect ratio of 3:1. At 150 degrees C, near-stoichiometric films with <2 at.% carbon and <3 at.% oxygen can be deposited if the gaseous ammonia is precracked by a remote plasma source; the resulting films have low resistivities of 320 mu Omega cm but are not superconducting down to 4 K. Published by the AVS.