Suitable photo-resists for two-photon polymerization using femtosecond fiber lasers

被引：8
作者：
Rajamanickam, V. P. [1 ,2 ]
Ferrara, L. [1 ]
Toma, A. [1 ]
Zaccaria, R. Proietti [1 ]
Das, G. [1 ]
Di Fabrizio, E. [3 ,4 ]
Liberale, C. [1 ,4 ]
机构：
[1] Ist Italiano Tecnol, I-16163 Genoa, Italy
[2] Univ Genoa, I-16145 Genoa, Italy
[3] Magna Graecia Univ Catanzaro, Dipartimento Med Sperimentale & Clin, Lab BIONEM, I-88100 Catanzaro, Italy
[4] King Abdullah Univ Sci & Technol, Thuwal 239556900, Saudi Arabia
来源：
MICROELECTRONIC ENGINEERING | 2014年 / 121卷
关键词：
Femtosecond fiber laser (fs fiber laser); Bisphenol A ethoxylate diacrylate (BPA-EDA); Isopropyl thioxanthone (ITX); 7-Diethylamino-3-thenoylcoumarin (DETC); 4,4 ' Bis(diethylamino) benzophenone (BDEB); Two-photon polymerization (TPP); FABRICATION; PHOTOPOLYMERIZATION; LITHOGRAPHY; ABSORPTION; MICRO; MICROFABRICATION; NANOSTRUCTURES;
D O I：
10.1016/j.mee.2014.04.040
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present suitable materials with good optical and mechanical properties, simple processing, efficient and optimized for two-photon polymerization (TPP) with femtosecond fiber lasers. We selected readily available acrylic monomer Bisphenol A ethoxylate diacrylate (BPA-EDA) with three different photoinitiators (PIs), isopropyl thioxanthone (ITX), 7-diethylamino-3-thenoylcoumarin (DETC), and 4,4' bis(diethylamino) benzophenone (BDEB), since their absorption spectra match well with the laser wavelength at 780 nm. These PIs grant efficient radical generation, reactivity and high solubility in acrylic monomers. Finally, good optical and mechanical properties are demonstrated by the fabrication of different micro-structures. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：135 / 138
页数：4
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