Particle on surface: 3D-effects in dry laser cleaning

被引:68
|
作者
Luk'Yanchuk, BS [1 ]
Wang, ZB [1 ]
Song, WD [1 ]
Hong, MH [1 ]
机构
[1] Agcy Sci Technol & Res, Data Storage Inst, Singapore 117608, Singapore
来源
关键词
D O I
10.1007/s00339-004-2567-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Previous analysis of dry laser cleaning within the frame of a one-dimensional (1D) model with homogeneous surface heating shows that this model disagrees with experiments by one-two orders of magnitude. The particle on the surface produces an inhomogeneous intensity distribution in its vicinity due to scattering and diffraction. This produces a nonstationary 3D distribution of the temperature and nonstationary 3D thermal deformations of the surface. If one uses the Mie theory for calculation of inhomogeneous intensity then in some region of the parameters, the 3D model predicts results close to the experimental ones. The next step was done when the scattering effects for radiation reflected from the surface was taken into account (so-called "particle on surface" problem). This approach yields results close to the experimental one within the wide range of parameters.
引用
收藏
页码:747 / 751
页数:5
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