Strain induced stabilization of stepped Si and Ge surfaces near (001)

被引:56
作者
Shenoy, VB [1 ]
Ciobanu, CV [1 ]
Freund, LB [1 ]
机构
[1] Brown Univ, Div Engn, Providence, RI 02912 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.1491611
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on calculations of the formation energies of several [100] and [110] oriented step structures on biaxially stressed Si and Ge (001) surfaces. It is shown that a novel rebonded [100] oriented single-height step is strongly stabilized by compressive strain compared to most well-known step structures. We propose that the side walls of "hut"-shaped quantum dots observed in recent experiments on SiGe/Si films are made up of these steps. Our calculations provide an explanation for the nucleationless growth of shallow mounds, with steps along the [100] and [110] directions in low- and high-misfit films, respectively, and for the stability of the (105) facets under compressive strain. (C) 2002 American Institute of Physics.
引用
收藏
页码:364 / 366
页数:3
相关论文
共 17 条
[1]   STABILITIES OF SINGLE-LAYER AND BILAYER STEPS ON SI(001) SURFACES [J].
CHADI, DJ .
PHYSICAL REVIEW LETTERS, 1987, 59 (15) :1691-1694
[2]   MOLECULAR-DYNAMICS SIMULATION OF AMORPHOUS-GERMANIUM [J].
DING, KJ ;
ANDERSEN, HC .
PHYSICAL REVIEW B, 1986, 34 (10) :6987-6991
[3]   Surface morphology and quantum dot self-assembly in growth of strained-layer semiconducting films [J].
Khor, KE ;
DasSarma, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (04) :1051-1055
[4]  
MARCHENKO VI, 1980, ZH EKSP TEOR FIZ, V52, P129
[5]  
MO YW, 1990, PHYS REV LETT, V65, P1020, DOI 10.1142/S0217984990001732
[6]   Reversible shape evolution of Ge islands on Si(001) -: art. no. 256101 [J].
Rastelli, A ;
Kummer, M ;
von Känel, H .
PHYSICAL REVIEW LETTERS, 2001, 87 (25) :256101-1
[7]   Effects of stress on step energies and surface roughness [J].
Roland, C .
MRS BULLETIN, 1996, 21 (04) :27-30
[8]   A continuum description of the energetics and evolution of stepped surfaces in strained nanostructures [J].
Shenoy, VB ;
Freund, LB .
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2002, 50 (09) :1817-1841
[9]   COMPUTER-SIMULATION OF LOCAL ORDER IN CONDENSED PHASES OF SILICON [J].
STILLINGER, FH ;
WEBER, TA .
PHYSICAL REVIEW B, 1985, 31 (08) :5262-5271
[10]   Nucleationless three-dimensional island formation in low-misfit heteroepitaxy [J].
Sutter, P ;
Lagally, MG .
PHYSICAL REVIEW LETTERS, 2000, 84 (20) :4637-4640