Innovations with A Massively-Paralleled, Microelectromechanical Systems (MEMS) toward Piston-Mode-Based Phase Light Modulator (PLM)

被引：13

作者：

Oden, Patrick, I ^{[1
,2
]}

Bartlett, Terry A. ^{[1
,2
]}

McDonald, William C. ^{[1
,2
]}

Baker, James C. ^{[1
,2
]}

Hall, James N. ^{[1
,3
]}

机构：

[1] Texas Instruments Inc, 63333 TI Blvd, Dallas, TX 75024 USA

[2] DLP Prod Business Unit, San Francisco, CA 94102 USA

[3] Kilby Res Labs, Jefferson, AR 65101 USA

来源：

EMERGING DIGITAL MICROMIRROR DEVICE BASED SYSTEMS AND APPLICATIONS XII | 2020年 / 11294卷

关键词：

DLP technology; phase modulation; MEMS; micro-mirrors; DMD; display; PLM;

D O I：

10.1117/12.2550582

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Piston-mode Fourier based optical imaging created using an adaptation of the base DLP Products torsional, spatial light modulator technology is presented. Technology, advancements and performance metrics such as, actuation speed, efficiency, and pixel coupling are shown for this 10.8 mu m pitched pixel array. Device potential includes upwards of 5.7kframes/sec actuation.

引用

页数：7

共 6 条

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Bartlett, Terry A. ;

McDonald, William C. ;

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EMERGING DIGITAL MICROMIRROR DEVICE BASED SYSTEMS AND APPLICATIONS XI, 2019, 10932

[2]

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[3] Combining digital optical MEMS, CMOS and algorithms for unique display solutions [J].

Hornbeck, Larry J. .

2007 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2, 2007, :17-24

[4]

Saleh Bahaa E.A., 1991, FUNDAMENTALS PHOTONI

[5]

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[6]

Swanson G.J., 1991, 914ESDTR90188 MIT LI

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